KYKY-SBC-12 Ion Sputtering Equipment Configuration
Description:
Ion Sputter Coater for coating non conducting sample.Sample preparation for SEM.
Specification:
Working Chamber Diameter:75-150mm
Suitable Rotary Pump:For Evacuation
Deposition Rate:2-10nm/min
Power:220V/50Hz
Glass processing chamber: ∮100mm; 130mm High.
Specimen stage size: ∮40mm( Hold 6 specimen cups)
Golden target size: ∮58mm*0.12mm(thickness)
Vacuum detection: Pirani gage
Vacuum protection:20 pa with microscale inflation valve
Medium Gas:Argon or air with argon gas special air inlet and gas regulating in microscale.
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