Gvc-1000 technical scheme
1. Using single chip microcomputer as processor, it has independent intellectual property rights, good expansibility, and can be customized for users;
2. 5.1 inch touch operation LCD, can set the parameters of sputtering current, sputtering time, working sputtering current and remaining sputtering time;
3. The sputtering current can be adjusted continuously in 3-30 Ma step size of 1 mA;
4. 溅射时间设定范围1-600秒,步长为1秒;
4. The sputtering time is set in the range of 1-600 seconds and the step size is 1 second;
5. It has the double interlock of sputtering current and vacuum degree, which is safe and reliable. If any adjustment is triggered, the system can stop working to prevent equipment damage due to misoperation;
6. Four samples with a diameter of 25 mm or 6 samples with a diameter of 15 mm can be placed at the same time, and the maximum diameter of a single sample cup is φ 50 mm;
7. The limit vacuum is better than 1pA and the pumping speed of vacuum pump is 1L / s;
8. 工作腔尺寸为φ108×130mm;
8. The size of working chamber is φ 108 × 130mm;
isplay of sputtering current and vacuum degree, screen brightness adjustment function, system working time and target use time display, which is very convenient for users to understand the working state of the system.
Gvc-2000 technical scheme
1. Using single chip microcomputer as processor, it has independent intellectual property rights, good expansibility, and can be customized for users;
2. 5.1英寸触摸操作液晶显示屏,可现实设定溅射电流、溅射时间,工作溅射电流、剩余溅射时间等参数;
2. 5.1 inch touch operation LCD, can set the parameters of sputtering current, sputtering time, working sputtering current and remaining sputtering time;
The sputtering current can be adjusted within 455 Ma steps;
4. The sputtering vacuum is controlled independently, independent of sputtering current, and the minimum regulation is 0.1 PA;
5. The system provides the working parameters of gold and platinum for air and argon, which can be used directly. At the same time, three kinds of customized targets are provided, and users can set working parameters according to their own needs;
6. The sputtering time is set in the range of 1-600 seconds, and the minimum adjustment is 1 second;
7. It has the double interlock of sputtering current and vacuum degree, which is safe and reliable. If any adjustment is triggered, the system can stop working to prevent equipment damage due to misoperation;
8. The limit vacuum is better than 1pA and the pumping speed of vacuum pump is 1L / s;
9. The system has the functions of real-time curve display of sputtering current and vacuum degree, screen brightness adjustment function, system working time and target use time display, which is very convenient
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